Low Resistivity Halogen-Free TiN Films Grown with Hydrazine at Low Temperature
Very thin films grown by ALD with hydrazine on SiCOH and SiO2 SAN DIEGO, CA, USA, June 23, 2022 /EINPresswire.com/ -- RASIRC announced new UCSD research shows that TiN film grown by low temperature ALD can yield resistivity below 220 uΩ-cm with a non- …